Piezoelectric Sensor And Robot Hand

ABSTRACT

A piezoelectric sensor includes an elastic body having a first surface, a regulatory section which is disposed at a position where the regulatory section faces the first surface of the elastic body, and which is configured to limit a deformation of the elastic body, and a first piezoelectric element which is partially fixed to the regulatory section, and which deforms in accordance with the deformation of the elastic body, wherein the first piezoelectric element outputs a voltage signal which increases and decreases from a reference voltage in accordance with a direction of the deformation.

The present application is based on, and claims priority from JP Application Serial Number 2021-108748, filed Jun. 30, 2021, the disclosure of which is hereby incorporated by reference herein in its entirety.

BACKGROUND 1. Technical Field

The present disclosure relates to a piezoelectric sensor and a robot hand.

2. Related Art

In JP-A-2018-72024 (Document 1), there is disclosed a robot having a gripping device provided with a pressure sensor as an industrial robot used in a manufacturing line or the like. The pressure sensor is a sensor for outputting pressure as an electric signal.

The gripping device is provided with a pair of gripping sections which are openable and closable, and the pressure sensor provided to the gripping sections. When a gripping target article is gripped by the gripping sections, the pressure sensor makes contact with the gripping target article to thereby deform, and thus, a voltage signal is output from the pressure sensor. A control device of the robot controls gripping force of the gripping device based on the voltage signal.

This pressure sensor has a first electrode, a second electrode, and an intermediate layer as a piezoelectric body which is disposed between the first electrode and the second electrode, and generates electricity due to a deformation. Between each of the electrodes and the intermediate layer, there is caused a change in capacitance, and thus, the electricity is generated. By detecting an amount of the generation of the electricity and presence or absence of the generation of the electricity, the pressure sensor functions.

In the pressure sensor described in Document 1, the electricity is generated when the intermediate layer deforms, but even when the intermediate layer deforms in deformation modes different from each other, it is unachievable to distinguish the deformation modes from each other. For example, when the pressure sensor is pressed by the gripping target article, compressive force is applied to the intermediate layer. In contrast, when the gripping target article is lifted by the robot in a state in which the gripping device grips the gripping target article, thrust force derived from gravitational force caused in the gripping target article is applied to the intermediate layer of the pressure sensor together with the compressive force described above.

However, it is unachievable for the pressure sensor described in Document 1 to distinguish the compressive force and the thrust force from each other. Therefore, in the control device for the robot, there is a problem that it is unachievable to distinguish between the state in which the gripping target article is simply gripped and the state in which the gripping target article is lifted while being gripped.

SUMMARY

A piezoelectric sensor according to an application example of the present disclosure includes an elastic body having a first surface, a regulatory section which is disposed at a position where the regulatory section faces the first surface of the elastic body, and which is configured to limit a deformation of the elastic body, and a piezoelectric element which is partially fixed to the regulatory section, and which deforms in accordance with the deformation of the elastic body, wherein the piezoelectric element outputs a voltage signal which increases and decreases from the reference voltage in accordance with a direction of the deformation.

A robot hand according to an application example of the present disclosure includes the piezoelectric sensor according to the application example of the present disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a robot hand according to an embodiment.

FIG. 2 is a perspective view showing a tip of a finger part shown in FIG. 1 in an enlarged manner, and is a perspective view showing the piezoelectric sensor according to a first embodiment in an exploded manner.

FIG. 3 is a plan view of the piezoelectric sensor shown in FIG. 2 when viewed from a position on an X axis.

FIG. 4 is a diagram showing an example of an output circuit for amplifying a voltage generated in a piezoelectric element.

FIG. 5 is a diagram for explaining a deformation mode of an elastic body when force is applied from a variety of directions to the piezoelectric sensor shown in FIG. 3 .

FIG. 6 is a diagram showing an example of a waveform (an output waveform) of a voltage signal output from the piezoelectric element shown in FIG. 3 when the elastic body has deformed in the deformation mode shown in FIG. 5 .

FIG. 7 is a diagram showing an example of an output waveform obtained from the piezoelectric sensor when a degree of a relaxation phenomenon is different.

FIG. 8 is a plan view of a piezoelectric sensor according to a second embodiment when viewed from a position on the X axis.

FIG. 9 is a diagram showing an example of waveforms (output waveforms) of voltage signals output from the piezoelectric element shown in FIG. 8 when the elastic body has deformed in the deformation mode shown in FIG. 5 .

FIG. 10 is a plan view of a piezoelectric sensor according to a third embodiment when viewed from a position on the X axis.

FIG. 11 is a diagram for explaining a deformation mode of an elastic body when force is applied from a variety of directions to the piezoelectric sensor shown in FIG. 10 .

FIG. 12 is a plan view of a piezoelectric sensor according to a fourth embodiment when viewed from a position on the X axis.

FIG. 13 is a plan view of a piezoelectric sensor according to a fifth embodiment when viewed from a position on the X axis.

FIG. 14 is a plan view of a piezoelectric sensor according to a sixth embodiment when viewed from a position on the X axis.

FIG. 15 is a diagram for explaining a deformation mode of an elastic body when force is applied from a variety of directions to the piezoelectric sensor shown in FIG. 14 .

FIG. 16 is a diagram showing an example of waveforms (output waveforms) of voltage signals output from the piezoelectric element shown in FIG. 14 when the elastic body has deformed in the deformation mode shown in FIG. 15 .

FIG. 17 is a plan view of a piezoelectric sensor according to a seventh embodiment when viewed from a position on the X axis.

FIG. 18 is a diagram showing an example of waveforms (output waveforms) of voltage signals output from the piezoelectric element shown in FIG. 17 when the elastic body has deformed in the deformation mode shown in FIG. 15 .

FIG. 19 is a plan view of a piezoelectric sensor according to an eighth embodiment when viewed from a position on the X axis.

FIG. 20 is a plan view of a piezoelectric sensor according to a ninth embodiment when viewed from a position on the X axis.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Some preferred embodiments of a piezoelectric sensor and a robot hand according to the present disclosure will hereinafter be described in detail based on the accompanying drawings.

1. Robot Hand

First, the robot hand according to the embodiment will be described.

FIG. 1 is a diagram showing the robot hand according to the embodiment. It should be noted that in FIG. 1 , an X axis, a Y axis, and a Z axis are set as three axes perpendicular to each other. Each of the axes is represented by an arrow, and a tip side is defined as a “positive” side, and a base end side is defined as a “negative” side. In the following description, an “X-axis direction,” for example, includes both of the positive direction and the negative direction in the X axis. Further, in the following description, the description will be presented defining the positive side in the Z axis is referred to as an “upper side,” and the negative side in the Z axis is referred to as a “lower side” in some cases.

A robot hand 10 shown in FIG. 1 is provided with a pair of finger parts 14, 15. By changing a distance between the finger part 14 and the finger part 15, it is possible to pinch an object W from both sides to grip the object W, and release the object W having once been gripped.

The robot hand 10 has a base 11, a pair of sliders 12, 13, the finger parts 14, 15, motors 16, 17, and piezoelectric sensors 1, wherein the pair of sliders 12, 13 slide with respect to the base 11, the finger parts 14, 15 are respectively fixed to the sliders 12, 13, and the motors 16, 17 respectively slide the sliders 12, 13. It should be noted that a configuration of the robot hand is not limited to the above.

The sliders 12, 13 are made slidable in the X-axis direction with respect to the base 11, respectively. Further, the motor 16 is coupled to the slider 12, and the slider 12 slides due to the drive by the motor 16. Similarly, the motor 17 is coupled to the slider 13, and the slider 13 slides due to the drive by the motor 17.

By selecting the rotational direction of the motors 16, 17 to move the sliders 12, 13 toward the respective directions opposite to each other, it is possible to make the finger parts 14, 15 come closer to each other, and get away from each other. Thus, it is possible to grip the object W with the finger parts 14, 15, and to release the object W having once been gripped. It should be noted that the robot hand 10 can be provided with a configuration in which either one of the finger parts 14, 15 is moved, and the other is fixed.

The finger parts 14, 15 are each provided with the piezoelectric sensor 1. The piezoelectric sensors 1 are respectively disposed on surfaces opposed to each other in the finger parts 14, 15, namely gripping surfaces 141, 151. When pinching the object W between the gripping surface 141 and the gripping surface 151, the piezoelectric sensors 1 respectively intervene between the gripping surfaces 141, 151 and the object W. Therefore, each of the piezoelectric sensors 1 receives reactive force from the object W, and then outputs a voltage corresponding to the reactive force. Thus, the robot hand 10 has a function of detecting a state of the gripping of the object W based on the output voltages from the piezoelectric sensors 1. It should be noted that the piezoelectric sensor 1 can be provided to just one of the finger parts 14, 15.

The robot hand 10 is hereinabove described, but the piezoelectric sensor 1 can be used in a variety of devices other than the robot hand 10 such as a haptic sensor, a gaming controller, a teleoperation controller, an MR (mixed reality) controller, a user interface having flexibility, and a variety of ON/OFF sensors.

2. Piezoelectric Sensor According to First Embodiment

Then, the piezoelectric sensor according to the first embodiment will be described.

FIG. 2 is a perspective view showing a tip of the finger part 14 shown in FIG. 1 in an enlarged manner, and is a perspective view showing the piezoelectric sensor 1 according to the first embodiment in an exploded manner. FIG. 3 is a plan view of the piezoelectric sensor 1 shown in FIG. 2 when viewed from a position on the X axis.

The piezoelectric sensor 1 shown in FIG. 2 and FIG. 3 is attached to the gripping surface 141 of the finger part 14. The piezoelectric sensor 1 is provided with an elastic body 2, a regulatory section 3, and a piezoelectric element 41.

The elastic body 2 has elasticity, and is disposed so as to have contact with the gripping surface 141. It should be noted that an arbitrary object can intervene between the elastic body 2 and the gripping surface 141. The elasticity means a property of deforming in accordance with force when the force is applied, and being restored to an original shape when the force is removed. Therefore, when force is applied to the elastic body 2, the elastic body 2 deforms, and the force propagates to every part of the elastic body 2.

The elastic body 2 shown in FIG. 2 and FIG. 3 is shaped like a plate spreading in a Y-Z plane, and has six surfaces. Out of the six surfaces, the two surfaces crossing the Y axis are defined as a first surface 201 and a second surface 202, the two surfaces crossing the X axis are defined as a third surface 203 and a fourth surface 204, and the two surfaces crossing the Z axis are defined as a fifth surface 205 and a sixth surface 206.

The third surface 203 and the fourth surface 204 are principal surfaces having an obverse-reverse relationship with each other in the elastic body 2. The third surface 203 is a surface facing the object W, and the fourth surface 204 is fixed to the gripping surface 141. The third surface 203 and the fourth surface 204 shown in FIG. 3 each have a rectangular shape. Further, in the elastic body 2 shown in FIG. 2 , a central portion of the third surface 203 forms a convexly curved surface 207. Thus, when the third surface 203 makes contact with the object W, the convexly curved surface 207 can preferentially make contact therewith. As a result, when force is applied to the elastic body 2, it is possible to propagate the force from the central portion of the third surface 203 toward the circumferential edge portion.

As a constituent material of the elastic body 2, there can be cited, for example, rubber, elastomer, and foamed resin. Among the above, as the rubber, there can be cited, for example, polyisobutylene, polyisoprene, chloroprene rubber, butyl rubber, silicone rubber, fluorine-contained rubber, acrylic rubber, polyurethane rubber, ethylene-propylene rubber, butadiene rubber, acrylonitrile-butadiene rubber, and styrene-butadiene rubber.

The regulatory section 3 shown in FIG. 2 and FIG. 3 is disposed on the gripping surface 141, and shaped like a frame surrounding the elastic body 2. An inner side surface of the regulatory section 3 has contact with an outer side surface of the elastic body 2. In other words, when making a plan view of the third surface 203 of the elastic body 2, the elastic body 2 fits into the inside of the regulatory section 3. It should be noted that some gap can exist between the regulatory section 3 and the elastic body 2. Further, an arbitrary object can intervene between the regulatory section 3 and the gripping surface 141.

The regulatory section 3 has two first wall parts 31, 32 extending along the Z axis, and two second wall parts 33, 34 extending along the Y axis.

The thickness t1 of each of the first wall parts 31, 32 is made thicker than the thickness t2 of the second wall parts 33, 34. Thus, the first wall parts 31, 32 become higher in bending rigidity than the second wall parts 33, 34. As a result, the first wall parts 31, 32 become difficult to deform when being pressed by the elastic body 2. Specifically, the first wall part 31 and the first wall part 32 respectively face the first surface 201 and the second surface 202 of the elastic body 2 in an natural state. Specifically, the first wall part 31 and the first wall part 32 have contact with the first surface 201 and the second surface 202 of the elastic body 2, or are adjacent thereto via a slight gap. Therefore, when the elastic body 2 receives force to be urged to make a deformation in the Y-axis direction, the deformation is limited. It should be noted that the thickness of the first wall parts 31, 32 means a length in the Y-axis direction.

The second wall parts 33, 34 are made thinner in thickness than the first wall parts 31, 32. Thus, the second wall parts 33, 34 become lower in bending rigidity than the first wall parts 31, 32. As a result, the second wall parts 33, 34 become easy to deform when being pressed by the elastic body 2. In other words, the second wall parts 33, 34 have contact with the elastic body 2 in the natural state, or are adjacent to the elastic body 2 in the natural state with a slight gap. Therefore, when the elastic body 2 receives force to be urged to deform in the Z-axis direction, the second wall parts 33, 34 are also displaced along the Z axis due to the deformation of the elastic body 2. In other words, a bending deformation toward the Z-axis direction occurs in the second wall parts 33, 34. On this occasion, both ends in the Y-axis direction of the second wall parts 33, 34 are coupled to the first wall parts 31, 32, and are therefore hardly displaced. It should be noted that the thickness of the second wall parts 33, 34 means a length in the Z-axis direction.

A constituent material of the regulatory section 3 is not particularly limited, but there can be cited, for example, a resin material, a ceramics material, and a metal material.

The thickness of the first wall parts 31, 32 is arbitrarily set in accordance with the constituent material, but is preferably no smaller than 0.5 mm and no larger than 20 mm, as an example, and is more preferably no smaller than 1 mm and no larger than 10 mm. Thus, the first wall parts 31, 32 have sufficient bending rigidity, and become difficult to particularly deform even when force is applied to the elastic body 2.

The thickness of the second wall parts 33, 34 is arbitrarily set in accordance with the constituent material, but is preferably no higher than 60% of the thickness of the first wall parts 31, 32, as an example, and is more preferably no lower than 5% and no higher than 40%. Thus, the second wall parts 33, 34 have sufficient flexibility, and when force is applied to the elastic body 2, the second wall parts 33, 34 easily deform in accordance with the force. Therefore, it becomes easy to transfer the deformation to the piezoelectric element 41, and thus, it is possible to increase the sensitivity of the piezoelectric sensor 1.

Although not shown in the drawings, the piezoelectric element 41 is provided with a piezoelectric body, and a pair of electrodes disposed via the piezoelectric body. The piezoelectric body generates a voltage between the electrodes due to the piezoelectric effect when the piezoelectric body makes, for example, a bending deformation. By detecting the voltage output from the piezoelectric element 41, a direction and a magnitude of the force thus received are identified.

The piezoelectric element 41 shown in FIG. 2 is disposed between the fifth surface 205 of the elastic body 2 and the second wall part 33. Further, when the bending deformation occurs in the second wall part 33 due to the deformation of the elastic body 2, a bending deformation also occurs similarly in the piezoelectric element 41. By the piezoelectric element 41 being partially fixed to the second wall part 33 in such a manner, it is possible to prevent damage from occurring in the piezoelectric element 41 due to the bending deformation. In other words, by the second wall part 33 reinforcing the piezoelectric element 41, it becomes difficult for a piezoelectric property of the piezoelectric element 41 to deteriorate even when the bending deformation repeatedly occurs in the piezoelectric element 41 with a short period. Further, when unloaded, it becomes easy for the piezoelectric element 41 to be restored to the original shape. In other words, followability of the piezoelectric element 41 with respect to the deformation of the elastic body 2 is enhanced. Thus, it is possible to suppress the deterioration of accuracy of force detection.

As the piezoelectric material constituting the piezoelectric body, there can be cited, for example, piezoelectric ceramics such as lead titanate zirconate (PZT), barium titanate, and lead titanate, and piezoelectric plastic such as polyvinylidene fluoride and polylactate.

It should be noted that the piezoelectric body has anisotropy in the piezoelectric effect in accordance with a piezoelectric constant provided to the piezoelectric material. In the present embodiment, the piezoelectric material is selected so that a voltage is generated between the electrodes in accordance with the bending deformation which occurs in the Z-axis direction. Thus, the direction and the magnitude of the force received by the elastic body 2 can be identified in accordance with the output from the piezoelectric element 41. As the piezoelectric constant representing such piezoelectric property, there can be cited, for example, d₃₁.

As the constituent material of the electrodes, there can be cited, for example, simple body or alloys of Al, Cu, Ni, Ag, and Au.

FIG. 4 shows an example of an output circuit for amplifying the voltage generated in the piezoelectric element 41.

An output circuit 49 shown in FIG. 4 is provided with an amplifier 491, a power supply 492, a power supply 493, and a detection section 494. The piezoelectric element 41 is coupled between an inverting input terminal and a non-inverting input terminal of the amplifier 491. The power supply 492 is coupled to the non-inverting input terminal. The power supply 493 is coupled to a power supply terminal of the amplifier 491. The detection section 494 is coupled to an output terminal of the amplifier 491.

Such an output circuit 49 amplifies the voltage generated in the piezoelectric element 41, and outputs the result as a voltage signal large in amplitude. It should be noted that as shown in FIG. 4 , when the power supply 492 is coupled to the input terminal of the amplifier 491, an offset is applied to an input signal by the power supply 492. Therefore, a voltage provided with the offset, namely a voltage signal which increases and decreases based on the reference voltage, is output to the detection section 494 as a result. It should be noted that the power supply 492 is only required to be provided as needed, and can also be eliminated.

The detection section 494 has a function of detecting a temporal variation of the voltage signal which increases and decreases based on the reference voltage, a function of determining the state of the grip of the object W based on the voltage value, and so on. As an example, the detection section 494 shown in FIG. 2 and FIG. 4 has a measuring section 495, an arithmetic section 496, and a determination section 497. The measuring section 495 measures the amplitude of the voltage signal output from the amplifier 491. The arithmetic section 496 calculates an increase-decrease value of the amplitude of the voltage signal with respect to the reference voltage. The determination section 497 performs, for example, a comparison between a calculation result by the arithmetic section 496 and an allowable range set in advance, and then outputs the result when it can be determined that an abnormality exists in the state of the grip.

At least a part of the detection section 494 is constituted by hardware provided with a processor, a memory, an external interface, and so on. As the processor, there can be cited, for example, a CPU (Central Processing Unit). By the processor retrieving and then executing a program stored in the memory, the function of the detection section 494 is realized. It should be noted that the hardware configuration is not limited thereto, and it is possible to adopt a configuration provided with an LSI (Large Scale Integration), an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), and so on.

Further, a circuit configuration of the output circuit provided to the piezoelectric sensor 1 is not limited to the circuit configuration shown in FIG. 4 , and the output circuit can be, for example, a circuit including a charge amplifier.

FIG. 5 is a diagram for explaining a deformation mode of the elastic body 2 when force is applied from a variety of directions to the piezoelectric sensor 1 shown in FIG. 3 . FIG. 6 is a diagram showing an example of a waveform (an output waveform) of the voltage signal output from the piezoelectric element 41 shown in FIG. 3 when the elastic body 2 has deformed in the deformation mode shown in FIG. 5 . It should be noted that in the example shown in FIG. 6 , there is shown a waveform of a relative potential to the reference voltage.

When no force is applied to the piezoelectric sensor 1, since the elastic body 2 keeps the natural state, the piezoelectric element 41 does not deform as shown in an upper left diagram in FIG. 5 . Therefore, theoretically, no voltage is generated in the piezoelectric element 41.

When downward force is applied to the piezoelectric sensor 1, downward pulling force is applied to the third surface 203 of the elastic body 2 as indicated by an arrow in an upper right diagram in FIG. 5 . Then, the elastic body 2 deforms so as to be drawn downward, and accordingly, a downward bending deformation occurs in the piezoelectric element 41. On this occasion, a negative voltage signal with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 6 . In other words, there is output a voltage signal which decreases from the reference voltage. Thus, it is possible to identify the fact that the downward force is applied to the piezoelectric sensor 1. It should be noted that an output direction of the voltage signal with respect to the reference voltage is decided in accordance with a polarization direction of the piezoelectric element and a circuit configuration, and can therefore be opposite to the above. In that case, an opposite result is obtained in the subsequent outputs.

It should be noted that when the robot hand 10 is moved while gripping the object W with the robot hand 10 to hold the object W in the air, such downward force is applied to the piezoelectric sensor 1 due to the weight of the object W. Therefore, the state in which the robot hand 10 lifts the object W can be identified based on the output waveform from the piezoelectric element 41.

When upward force is applied to the piezoelectric sensor 1, upward pulling force is applied to the third surface 203 of the elastic body 2 as indicated by an arrow in a lower left diagram in FIG. 5 . Then, the elastic body 2 deforms so as to be drawn upward, and accordingly, an upward bending deformation occurs in the piezoelectric element 41. On this occasion, a positive voltage signal with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 6 . In other words, there is output a voltage signal which increases from the reference voltage. Thus, it is possible to identify the fact that the upward force is applied to the piezoelectric sensor 1.

It should be noted that when the robot hand 10 is moved while gripping the object W with the robot hand 10 to press a lower surface of the object W against a body, such upward force is applied to the piezoelectric sensor 1. Therefore, the state in which the robot hand 10 presses the object W against the body can be identified based on the output waveform from the piezoelectric element 41.

When force in a pressing direction, namely force of pressing the elastic body 2 shown in FIG. 5 from the positive side in the X axis toward the negative side in the X axis, is applied to the piezoelectric sensor 1, a deformation of stretching in the vertical direction occurs in the third surface 203 of the elastic body 2 as indicated by an arrow in a lower right diagram in FIG. 5 . Then, the elastic body 2 stretches in the vertical direction, and accordingly, an upward bending deformation occurs in the piezoelectric element 41. It should be noted that the deformation amount of the bending deformation becomes smaller compared to when applying the upward force described above. Therefore, a positive voltage signal relatively smaller in voltage value with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 6 . Thus, it is possible to identify the fact that the force in the pressing direction is applied to the piezoelectric sensor 1.

It should be noted that when gripping the object W with the robot hand 10, the reactive force from the object W presses the piezoelectric sensor 1 against the gripping surface 141. Therefore, the state in which the robot hand 10 grips the object W can be identified based on the output waveform from the piezoelectric element 41.

An example of the deformation mode is hereinabove described, but the deformation direction such as the upward direction and the downward direction can be other directions.

Further, in the piezoelectric element 41, the voltage generated in the piezoelectric element 41 decreases with time in many cases by a relaxation phenomenon due to an influence of an internal resistance R and a leakage current, a parasitic capacitance, and so on in the output circuit 49 as shown in FIG. 4 . Therefore, the output waveform from the piezoelectric sensor 1 varies in accordance with the degree of the relaxation phenomenon as shown in FIG. 7 . FIG. 7 is a diagram showing an example of the output waveform obtained from the piezoelectric sensor 1 when the degree of the relaxation phenomenon is different.

When no relaxation is applied, the voltage hardly decreases with time similarly to the waveform shown in FIG. 6 .

When the relaxation is low, the voltage decreases with time, but an amount of the decrease is relatively small. In contrast, when the relaxation is high, the amount of the decrease becomes relatively large. Therefore, when identifying the direction and the magnitude of the force to be applied to the piezoelectric sensor 1 based on the output waveform from the piezoelectric element 41, it is preferable to take the variation in waveform based on such a relaxation phenomenon into consideration.

As described hereinabove, the piezoelectric sensor 1 according to the present embodiment is provided with the elastic body 2, the regulatory section 3, and the piezoelectric element 41. The elastic body 2 has the first surface 201. The regulatory section 3 is at least disposed at a position where the regulatory section 3 faces the first surface 201 of the elastic body 2 to limit the deformation of the elastic body 2. The piezoelectric element 41 is partially fixed to the regulatory section 3, and deforms in accordance with the deformation of the elastic body 2. The deformation of the piezoelectric element 41 means a change in shape of the piezoelectric element 41 from when the elastic body 2 does not deform. Further, the piezoelectric element 41 outputs the voltage signal which increases and decreases from the reference voltage in accordance with the deformation direction.

According to such a piezoelectric sensor 1, it is possible to detect the direction of the applied force when the force is applied in a plurality of directions different from each other such as the upward direction, the downward direction, and the pressing direction. In other words, it is possible for the piezoelectric sensor 1 to separately detect the compressive force and the thrust force. Thus, in the robot hand 10 provided with the piezoelectric sensor 1, it is possible to identify, for example, the state in which the object W is lifted, and the state in which the object W is pressed against a body in addition to the fact that the object W is gripped. Therefore, it is possible to appropriately operate the robot hand 10 in accordance with these states different from each other, and thus, it is possible to enhance the convenience.

Further, since the force is transferred to the piezoelectric element 41 via the elastic body 2, it is possible to prevent an impact from being directly applied to the piezoelectric element 41. Thus, it becomes difficult to damage the piezoelectric element 41.

Further, the robot hand 10 according to the embodiment described above is provided with such a piezoelectric sensor 1 as described above.

When using the piezoelectric sensor 1 to such a robot hand 10 as shown in FIG. 1 , it is possible to realize the robot hand 10 with which it is possible to identify not only the fact that, for example, the object W is gripped, but also the state in which the object W is lifted, and the state in which the object W is pressed against a body.

Further, the piezoelectric sensor 1 is provided with a structure of making the elastic body 2 have contact with the object W. Thus, since it is difficult to generate a major impact even when the piezoelectric sensor 1 makes contact with the object W, it is possible to grip the object W with the robot hand 10 without breaking the object W even when the rigidity of the object W is low. Further, it is possible to prevent the damage of the piezoelectric element 41 due to the impact. It should be noted that it is possible for the robot hand 10 to be provided with a piezoelectric sensor according to each of embodiments described later.

Further, in the piezoelectric sensor 1 according to the present embodiment, the regulatory section 3 is provided with the two first wall parts 31, 32 and the two second wall parts 33, 34. The second wall parts 33, 34 couple the first wall part 31 and the first wall part 32 to each other, and are thinner in thickness than the first wall parts 31, 32. Further, the piezoelectric element 41 is fixed at a position where the piezoelectric element 41 has contact with the second wall part 33.

According to such a configuration, since the piezoelectric element 41 is fixed so as to have contact with the second wall part 33, the durability of the piezoelectric element 41 increases, and at the same time, the followability of the piezoelectric element 41 to the deformation of the elastic body 2 is enhanced.

Further, the elastic body 2 has the third surface 203 having a rectangular shape. Further, the elastic body 2 is shaped like a plate having the third surface 203 as the principal surface.

According to such a configuration, since the third surface 203 relatively large in area faces the object W, it is possible to ensure the large contact area between the object W and the elastic body 2. Thus, it is possible to apply strong force to the elastic body 2, and the displacement of the fifth surface 205 on which the piezoelectric element 41 is exposed becomes large. As a result, it is possible to further increase the sensitivity of the piezoelectric sensor 1.

It should be noted that the shape of the third surface 203 is not limited to the rectangular shape, and can also be other shapes such as a square shape or a polygonal shape. Further, it is possible to adopt a shape with rounded corners and a shape with chamfered corners.

Further, as shown in FIG. 2 , the elastic body 2 has the convexly curved surface 207 as the contact surface which makes contact with the object W. The convexly curved surface 207 is disposed at a position at a distance from the piezoelectric element 41.

According to such a configuration, when the convexly curved surface 207 makes contact with the object W, it is possible to avoid the contact between the piezoelectric element 41 and the object W. Thus, it is possible to prevent the damage from occurring in the piezoelectric element 41. Further, since the elastic body 2 has the elasticity, even when arranging the piezoelectric element 41 at a position located at a distance from the convexly curved surface 207, the frictional force generated between the elastic body 2 and the object W is converted into the deformation of the piezoelectric element 41 in good condition. Therefore, it is possible to efficiently detect the frictional force in the piezoelectric element 41. As a result, there is realized the piezoelectric sensor 1 excellent in sensitivity.

It should be noted that it is possible for the elastic body 2 to have a protruding surface having an arbitrary shape instead of the convexly curved surface 207, but when adopting the convexly curved surface 207, the piezoelectric sensor 1 which detects force applied from a variety of directions in good condition is easily realized.

3. Piezoelectric Sensor According to Second Embodiment

Then, a piezoelectric sensor according to a second embodiment will be described.

FIG. 8 is a plan view of the piezoelectric sensor according to the second embodiment when viewed from a position on the X axis.

The second embodiment will hereinafter be described. The following explanation is focused mainly on differences from the first embodiment, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the first embodiment are attached with the same reference symbols.

A piezoelectric sensor 1A according to the second embodiment is substantially the same as the piezoelectric sensor 1 according to the first embodiment except the point that the piezoelectric sensor 1A is provided with a piezoelectric element 42 in addition to the piezoelectric element 41.

As shown in FIG. 8 , the piezoelectric element 42 is disposed between the elastic body 2 and the second wall part 34. Further, when the bending deformation occurs in the second wall part 34 due to the deformation of the elastic body 2, a bending deformation also occurs similarly in the piezoelectric element 42. The piezoelectric element 42 is substantially the same in configuration as the piezoelectric element 41.

It should be noted that a relationship between the direction of the bending deformation of the piezoelectric element 42 and the output waveform from the piezoelectric element 42 can be the same as the relationship between the direction of the bending deformation of the piezoelectric element 41 and the output waveform from the piezoelectric element 41, but is preferably opposite to the relationship between the direction of the bending deformation of the piezoelectric element 41 and the output waveform from the piezoelectric element 41. In other words, when bending the piezoelectric element 42 and the piezoelectric element 41 in the same direction, the voltage signals to be output are preferably different in polarity from each other. Thus, it is possible to more accurately identify the direction of the force applied to the elastic body 2 based on the output waveforms from the two piezoelectric elements 41, 42.

FIG. 9 is a diagram showing an example of waveforms (output waveforms) of the voltage signals output from the piezoelectric elements 41, 42 shown in FIG. 8 when the elastic body 2 has deformed in the deformation mode shown in FIG. 5 . It should be noted that the output waveforms shown in FIG. 9 are the waveforms obtained when adopting a configuration in which when bending the piezoelectric elements 41, 42 in respective directions the same as each other, the voltage signals different in polarity from each other are output. Further, in the example shown in FIG. 9 , there are shown waveforms of relative potentials to the reference voltage.

When downward force is applied to the piezoelectric sensor 1A, a downward bending deformation occurs in each of the piezoelectric elements 41, 42. Therefore, the voltage signals different in polarity from each other are output from the piezoelectric elements 41, 42, respectively. For example, in the example shown in FIG. 9 , it is possible to identify the fact that the downward force is applied to the piezoelectric sensor 1A based on the fact that the polarity of the voltage signal output from the piezoelectric element 41 is negative, and the polarity of the voltage signal output from the piezoelectric element 42 is positive. It should be noted that the polarities of the voltage signals described above and described below can be reversed similarly to the first embodiment.

When upward force is applied to the piezoelectric sensor 1A, an upward bending deformation occurs in each of the piezoelectric elements 41, 42. Therefore, the voltage signals different in polarity from each other are output from the piezoelectric elements 41, 42, respectively. For example, in the example shown in FIG. 9 , it is possible to identify the fact that the upward force is applied to the piezoelectric sensor 1A based on the fact that the polarity of the voltage signal output from the piezoelectric element 41 is positive, and the polarity of the voltage signal output from the piezoelectric element 42 is negative.

When force in the pressing direction, namely force of pressing the elastic body 2 shown in FIG. 8 from the positive side in the X axis toward the negative side in the X axis, is applied to the piezoelectric sensor 1A, an upward bending deformation occurs in the piezoelectric element 41, and a downward bending deformation occurs in the piezoelectric element 42. Therefore, the voltage signals the same in polarity as each other are output from the piezoelectric elements 41, 42, respectively. Thus, it is possible to identify the fact that the force in the pressing direction is applied to the piezoelectric sensor 1A.

According also to such a second embodiment, substantially the same advantages as in the first embodiment can be obtained.

As described above, when making a plan view of the third surface 203, the elastic body 2 of the piezoelectric sensor 1A has the fifth surface 205 and the sixth surface 206 as two opposed surfaces corresponding to two sides opposed to each other. Further, the piezoelectric element 41 and the piezoelectric element 42 are arranged at positions where the piezoelectric element 41 and the piezoelectric element 42 are respectively exposed on the fifth surface 205 and the sixth surface 206.

According to such a configuration, by making the polarities of the voltage signals output when bending the piezoelectric elements 41, 42 in the same direction different from each other, for example, it is possible to make one of the voltage signals output from the piezoelectric elements 41, 42 increase from the reference voltage, and make the other thereof decrease from the reference voltage. Thus, a difference between the waveforms of the voltage signals output from the piezoelectric elements 41, 42 is made clearer. As a result, even when, for example, a noise is mixed in with the voltage signal, it is possible to easily identify the direction of the force applied to the elastic body 2.

4. Piezoelectric Sensor According to Third Embodiment

Then, a piezoelectric sensor according to a third embodiment will be described.

FIG. 10 is a plan view of the piezoelectric sensor according to the third embodiment when viewed from a position on the X axis.

The third embodiment will hereinafter be described. The following explanation is focused mainly on differences from the first embodiment, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the first embodiment are attached with the same reference symbols.

In a piezoelectric sensor 1B according to the present embodiment, the elastic body 2 has the second surface 202 opposed to the first surface 201. Further, the regulatory section 3 is provided with two first wall parts 31, 32. The first wall part 31 is arranged at a position where the first wall part 31 faces the first surface 201 of the elastic body 2, and the first wall part 32 is arranged at a position where the first wall part 32 faces the second surface 202 of the elastic body 2.

Specifically, in the first embodiment described above, the regulatory section 3 has the two first wall parts 31, 32 and the two second wall parts 33, 34. In contrast, in the present embodiment, the second wall parts 33, 34 are omitted. As a result, in the present embodiment, as shown in FIG. 10 , the regulatory section 3 is constituted only by the two first wall parts 31, 32.

Further, in the first embodiment described above, the piezoelectric element 41 is fixed to the second wall part 33. In contrast, in the present embodiment, the piezoelectric element 41 is fixed so as to connect the first wall parts 31, 32 to each other. Specifically, the piezoelectric element 41 is arranged at a position where the piezoelectric element 41 faces the fifth surface 205 of the elastic body 2, and at the same time, an end portion at the positive side in the Y axis of the piezoelectric element 41 is fixed to the first wall part 31, and an end portion at the negative side in the Y axis of the piezoelectric element 41 is fixed to the first wall part 32.

According to such a configuration, similarly to the first embodiment, the deformation of the elastic body 2 is limited by the two first wall parts 31, 32 extending along the Z axis. Further, in the present embodiment, the second wall parts 33, 34 provided to the first embodiment are omitted. Therefore, the fifth surface 205 of the elastic body 2 is no longer subject to the limitation in deformation by the second wall parts 33, 34. As a result, the deformation amount of the piezoelectric element 41 is apt to become larger compared to the first embodiment.

Therefore, by arranging the piezoelectric element 41 at the position where the piezoelectric element 41 faces the fifth surface 205, it is possible to further increase the sensitivity of the piezoelectric sensor 1B.

FIG. 11 is a diagram for explaining a deformation mode of the elastic body 2 when force is applied from a variety of directions to the piezoelectric sensor 1B shown in FIG. 10 .

When downward force is applied to the piezoelectric sensor 1B, a downward bending deformation occurs in the piezoelectric element 41 as shown in an upper right diagram in FIG. 11 . On this occasion, a negative voltage signal, for example, is output from the piezoelectric element 41 as shown in FIG. 6 . Thus, it is possible to identify the fact that the downward force is applied to the piezoelectric sensor 1B. It should be noted that the polarities of the voltage signals described above and described below can be reversed similarly to the first embodiment.

When upward force is applied to the piezoelectric sensor 1B, an upward bending deformation occurs in the piezoelectric element 41 as shown in a lower left diagram in FIG. 11 . Therefore, a positive voltage signal, for example, is output from the piezoelectric element 41 as shown in FIG. 6 . Thus, it is possible to identify the fact that the upward force is applied to the piezoelectric sensor 1B.

When force in the pressing direction, namely force of pressing the elastic body 2 shown in FIG. 11 from the positive side in the X axis toward the negative side in the X axis, is applied to the piezoelectric sensor 1B, an upward bending deformation occurs in the piezoelectric element 41 as shown in a lower right diagram in FIG. 11 , but the deformation amount becomes smaller compared to when applying the upward force described above. Therefore, a positive voltage signal relatively smaller in voltage value with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 6 . Thus, it is possible to identify the fact that the force in the pressing direction is applied to the piezoelectric sensor 1B.

According also to such a third embodiment as described above, substantially the same advantages as in the first embodiment can be obtained.

5. Piezoelectric Sensor According to Fourth Embodiment

Then, a piezoelectric sensor according to a fourth embodiment will be described.

FIG. 12 is a plan view of the piezoelectric sensor according to the fourth embodiment when viewed from a position on the X axis.

The fourth embodiment will hereinafter be described. The following explanation is focused mainly on differences from the second and third embodiments, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the second and third embodiments are attached with the same reference symbols.

A piezoelectric sensor 1C according to the fourth embodiment is substantially the same as the piezoelectric sensor 1B according to the third embodiment except the point that the piezoelectric sensor 1C is provided with the piezoelectric element 42 in addition to the piezoelectric element 41.

As shown in FIG. 12 , the piezoelectric element 42 is fixed so as to connect the first wall parts 31, 32 to each other. Specifically, the piezoelectric element 42 is arranged at a position where the piezoelectric element 42 faces the sixth surface 206 of the elastic body 2, and at the same time, an end portion at the positive side in the Y axis of the piezoelectric element 42 is fixed to the first wall part 31, and an end portion at the negative side in the Y axis of the piezoelectric element 42 is fixed to the first wall part 32.

According to such a configuration, by making the polarities of the voltage signals output when bending the piezoelectric elements 41, 42 in the same direction different from each other, for example, it is possible to make one of the voltage signals output from the piezoelectric elements 41, 42 increase from the reference voltage, and make the other thereof decrease from the reference voltage similarly to the second embodiment. Therefore, a difference between the both parties becomes clear, and even when a noise is mixed in with the output signal, it is possible to easily identify the direction of the force applied to the elastic body 2.

According also to such a fourth embodiment as described above, substantially the same advantages as in the first through third embodiments can be obtained.

6. Piezoelectric Sensor According to Fifth Embodiment

Then, a piezoelectric sensor according to a fifth embodiment will be described.

FIG. 13 is a plan view of the piezoelectric sensor according to the fifth embodiment when viewed from a position on the X axis.

The fifth embodiment will hereinafter be described. The following explanation is focused mainly on differences from the third embodiment, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the third embodiment are attached with the same reference symbols.

A piezoelectric sensor 1D according to the fifth embodiment is substantially the same as the piezoelectric sensor 1B according to the third embodiment except the point that the shape of the regulatory section 3 is different.

The regulatory section 3 shown in FIG. 13 is provided with four columnar parts 351 through 354. The four columnar parts 351 through 354 are arranged at positions corresponding to four corners of the elastic body 2.

According to such a configuration, it is possible to suppress the volume of the regulatory section 3 to a minimum necessary value. Therefore, it is possible to achieve reduction in weight of the piezoelectric sensor 1D.

The columnar part 351 is arranged at a corner at the positive side in the Y axis and the positive side in the Z axis, and the columnar part 352 is arranged at a corner at the positive side in the Y axis and the negative side in the Z axis out of the four corners of the elastic body 2. The columnar part 353 is arranged at a corner at the negative side in the Y axis and the positive side in the Z axis, and the columnar part 354 is arranged at a corner at the negative side in the Y axis and the negative side in the Z axis out of the four corners of the elastic body 2.

As shown in FIG. 13 , the piezoelectric element 41 is fixed so as to connect the columnar parts 351, 353 to each other.

According also to such a fifth embodiment as described above, substantially the same advantages as in the third embodiment can be obtained.

7. Piezoelectric Sensor According to Sixth Embodiment

Then, a piezoelectric sensor according to a sixth embodiment will be described.

FIG. 14 is a plan view of the piezoelectric sensor according to the sixth embodiment when viewed from a position on the X axis.

The sixth embodiment will hereinafter be described. The following explanation is focused mainly on differences from the fourth and fifth embodiments, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the fourth and fifth embodiments are attached with the same reference symbols.

A piezoelectric sensor 1E according to the sixth embodiment is substantially the same as the piezoelectric sensor 1D according to the fifth embodiment except the point that the piezoelectric sensor 1E is provided with a piezoelectric element 43 in addition to the piezoelectric element 41.

As shown in FIG. 14 , the piezoelectric element 43 is fixed so as to connect the columnar parts 353, 354 to each other.

In other words, the piezoelectric sensor 1E is provided with the plurality of piezoelectric elements 41, 43. Further, the piezoelectric elements 41, 43 are different in installation direction from each other, and therefore deform in respective deformation directions different from each other due to a deformation of the elastic body 2.

Specifically, the fourth embodiment described above is also provided with the plurality of piezoelectric elements 41, 42, but these piezoelectric elements 41, 42 deform in the same deformation direction due to the deformation of the elastic body 2. For example, since the piezoelectric elements 41, 42 each have the detection axis parallel to the Z axis, when downward force is applied to the elastic body 2, the downward bending deformation occurs in both of the piezoelectric elements 41, 42.

In contrast, in the piezoelectric sensor 1E according to the present embodiment, the piezoelectric element 41 is arranged at the position where the piezoelectric element 41 faces the fifth surface 205 of the elastic body 2 on the one robot hand, and the piezoelectric element 43 is arranged at the position where the piezoelectric element 43 faces the second surface 202 of the elastic body 2 on the other robot hand. In other words, the piezoelectric element 41 has the detection axis parallel to the Z axis on the one robot hand, the piezoelectric element 43 has the detection axis parallel to the Y axis on the other robot hand. Therefore, it becomes possible for the piezoelectric sensor 1E to detect not only a deformation in the Z-axis direction of the elastic body 2, but also a deformation in the Y-axis direction thereof.

According also to such a sixth embodiment as described above, substantially the same advantages as in the fourth and fifth embodiments can be obtained.

FIG. 15 is a diagram for explaining a deformation mode of the elastic body 2 when force is applied from a variety of directions to the piezoelectric sensor 1E shown in FIG. 14 . FIG. 16 is a diagram showing an example of waveforms (output waveforms) of the voltage signals output from the piezoelectric elements 41, 43 shown in FIG. 14 when the elastic body 2 has deformed in the deformation mode shown in FIG. 15 . It should be noted that in the example shown in FIG. 16 , there are shown waveforms of relative potentials to the reference voltage.

When downward force is applied to the piezoelectric sensor 1E, downward pulling force is applied to the third surface 203 of the elastic body 2 as indicated by an arrow in an upper right diagram in FIG. 15 . Then, a downward bending deformation occurs in the piezoelectric element 41. On this occasion, a negative voltage signal with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 16 . Thus, it is possible to identify the fact that the downward force is applied to the piezoelectric sensor 1E. In contrast, a deformation hardly occurs in the piezoelectric element 43. Therefore, a voltage signal increasing or decreasing from the reference voltage is hardly output from the piezoelectric element 43. It should be noted that the polarities of the voltage signals described above and described below can be reversed similarly to the first embodiment.

When upward force is applied to the piezoelectric sensor 1E, upward pulling force is applied to the third surface 203 of the elastic body 2 as indicated by an arrow in a middle left diagram in FIG. 15 . Then, an upward bending deformation occurs in the piezoelectric element 41. On this occasion, a positive voltage signal with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 16 . Thus, it is possible to identify the fact that the upward force is applied to the piezoelectric sensor 1E. In contrast, a deformation hardly occurs in the piezoelectric element 43. Therefore, a voltage signal increasing or decreasing from the reference voltage is hardly output from the piezoelectric element 43.

When force in a pressing direction, namely force of pressing the elastic body 2 shown in FIG. 15 from the positive side in the X axis toward the negative side in the X axis, is applied to the piezoelectric sensor 1E, a deformation of expanding in all directions occurs in the third surface 203 of the elastic body 2 as indicated by arrows in a middle right diagram in FIG. 15 . Then, an upward bending deformation occurs in the piezoelectric element 41. On this occasion, a positive voltage signal relatively smaller in voltage value with respect to the reference voltage, for example, is output from the piezoelectric element 41 as shown in FIG. 16 . Further, a leftward (a direction toward the negative side in the Y axis) bending deformation occurs in the piezoelectric element 43. On this occasion, a positive voltage signal relatively smaller in voltage value with respect to the reference voltage, for example, is output from the piezoelectric element 43 as shown in FIG. 16 . Due to these voltage waveforms, it is possible to identify the fact that the force in the pressing direction is applied to the piezoelectric sensor 1E.

When leftward (a direction toward the negative side in the Y axis) force is applied to the piezoelectric sensor 1E, leftward pulling force is applied to the third surface 203 of the elastic body 2 as indicated by an arrow in a lower left diagram in FIG. 15 . Then, a leftward bending deformation occurs in the piezoelectric element 43. On this occasion, a positive voltage signal with respect to the reference voltage, for example, is output from the piezoelectric element 43 as shown in FIG. 16 . Thus, it is possible to identify the fact that the leftward force is applied to the piezoelectric sensor 1E. In contrast, a deformation hardly occurs in the piezoelectric element 41. Therefore, a voltage signal increasing or decreasing from the reference voltage is hardly output from the piezoelectric element 41.

When rightward (a direction toward the positive side in the Y axis) force is applied to the piezoelectric sensor 1E, rightward pulling force is applied to the third surface 203 of the elastic body 2 as indicated by an arrow in a lower right diagram in FIG. 15 . Then, a rightward bending deformation occurs in the piezoelectric element 43. On this occasion, a negative voltage signal with respect to the reference voltage, for example, is output from the piezoelectric element 43 as shown in FIG. 16 . Thus, it is possible to identify the fact that the rightward force is applied to the piezoelectric sensor 1E. In contrast, a deformation hardly occurs in the piezoelectric element 41. Therefore, a voltage signal increasing or decreasing from the reference voltage is hardly output from the piezoelectric element 41.

An example of the deformation mode is hereinabove described, but the deformation direction such as the upward direction, the downward direction, the leftward direction, and the rightward direction can be other directions.

As described above, when making a plan view of the third surface 203, the elastic body 2 of the piezoelectric sensor 1E has the fifth surface 205 and the second surface 202 as two adjacent surfaces corresponding to two sides adjacent to each other. Further, the piezoelectric element 41 and the piezoelectric element 43 are arranged at positions where the piezoelectric element 41 and the piezoelectric element 43 respectively face the fifth surface 205 and the second surface 202.

According to such a configuration, it is possible to realize the piezoelectric sensor 1E which is capable of detecting the direction of the applied force even when the force is applied from a larger number of directions than in the third embodiment. Specifically, it is possible to separately detect, for example, not only the force applied in the upward direction and the force applied in the downward direction, but also the force applied in the leftward direction and the force applied in the rightward direction. Thus, it is possible to closely catch a variety of motions of the robot hand 10 based on the output result of the piezoelectric sensor 1E. As a result, it is possible to more appropriately operate the robot hand 10, and it is possible to further enhance the convenience.

8. Piezoelectric Sensor According to Seventh Embodiment

Then, a piezoelectric sensor according to a seventh embodiment will be described.

FIG. 17 is a plan view of the piezoelectric sensor according to the seventh embodiment when viewed from a position on the X axis.

The seventh embodiment will hereinafter be described. The following explanation is focused mainly on differences from the fourth and sixth embodiments, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the fourth and sixth embodiments are attached with the same reference symbols.

A piezoelectric sensor 1F according to the seventh embodiment is substantially the same as the piezoelectric sensor 1E according to the sixth embodiment except the point that the piezoelectric sensor 1F is provided with piezoelectric elements 42, 44 in addition to the piezoelectric elements 41, 43.

The piezoelectric element 42 is fixed so as to connect the columnar parts 352, 354 to each other. The piezoelectric element 44 is fixed so as to connect the columnar parts 351, 352 to each other.

In other words, the piezoelectric sensor 1F is provided with the plurality of piezoelectric elements 41 through 44. Specifically, when making a plan view of the third surface 203, the elastic body 2 of the piezoelectric sensor 1F has the first surface 201, the second surface 202, the fifth surface 205, and the sixth surface 206 as four outer side surfaces corresponding to four sides constituting an outer edge. Further, as shown in FIG. 17 , the piezoelectric element 41 is disposed at a position where the piezoelectric element 41 faces the fifth surface 205, the piezoelectric element 42 is disposed at a position where the piezoelectric element 42 faces the sixth surface 206, the piezoelectric element 43 is disposed at a position where the piezoelectric element 43 faces the second surface 202, and the piezoelectric element 44 is disposed at a position where the piezoelectric element 44 faces the first surface 201.

According to such a configuration, since the four piezoelectric elements 41 through 44 are arranged so as to surround the periphery of the elastic body 2, a voltage signals are output from at least two of the piezoelectric elements as a result irrespective of the direction of the force applied to the elastic body 2. Therefore, the piezoelectric sensor 1F according to the present embodiment is made to have both of the advantages exerted by the fourth embodiment and the advantages exerted by the sixth embodiment. Specifically, for example, it is possible to separately detect the force applied in the upward direction, the force applied in the downward direction, the force applied in the leftward direction, and the force applied in the rightward direction, and at the same time, make one of the voltage signals output from two piezoelectric elements increase from the reference voltage, and make the other thereof decrease from the reference voltage. Therefore, it is possible to detect the force applied in a variety of directions with higher accuracy.

FIG. 18 is a diagram showing an example of waveforms (output waveforms) of the voltage signals output from the piezoelectric elements 41 through 44 shown in FIG. 17 when the elastic body 2 has deformed in the deformation mode shown in FIG. 15 . It should be noted that in the example shown in FIG. 18 , there are shown waveforms of relative potentials to the reference voltage.

When downward force is applied to the piezoelectric sensor 1F, a downward bending deformation occurs in the piezoelectric element 41, and a negative voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 . Further, a downward bending deformation also occurs in the piezoelectric element 42, and a positive voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 .

When upward force is applied to the piezoelectric sensor 1F, an upward bending deformation occurs in the piezoelectric element 41, and a positive voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 . Further, an upward bending deformation also occurs in the piezoelectric element 42, and a negative voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 .

When force in the pressing direction, namely force of pressing the elastic body 2 shown in FIG. 17 from the positive side in the X axis toward the negative side in the X axis, is applied to the piezoelectric sensor 1F, an upward bending deformation occurs in the piezoelectric element 41, a downward bending deformation occurs in the piezoelectric element 42, a leftward bending deformation occurs in the piezoelectric element 43, and a rightward bending deformation occurs in the piezoelectric element 44, and positive voltage signals relatively smaller in voltage value with respect to the reference voltage are respectively output as shown in FIG. 18 .

When leftward force is applied to the piezoelectric sensor 1F, a leftward bending deformation occurs in the piezoelectric element 43, and a positive voltage signal, for example, is output as shown in FIG. 18 . Further, a leftward bending deformation also occurs in the piezoelectric element 44, and a negative voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 .

When rightward force is applied to the piezoelectric sensor 1F, a rightward bending deformation occurs in the piezoelectric element 43, and a negative voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 . Further, a rightward bending deformation also occurs in the piezoelectric element 44, and a positive voltage signal with respect to the reference voltage, for example, is output as shown in FIG. 18 .

According also to such a seventh embodiment as described above, substantially the same advantages as in the fourth and sixth embodiments can be obtained.

9. Piezoelectric Sensor According to Eighth Embodiment

Then, a piezoelectric sensor according to an eighth embodiment will be described.

FIG. 19 is a plan view of the piezoelectric sensor according to the eighth embodiment when viewed from a position on the X axis.

The eighth embodiment will hereinafter be described. The following explanation is focused mainly on differences from the second embodiment, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the second embodiment are attached with the same reference symbols.

A piezoelectric sensor 1G according to the eighth embodiment is substantially the same as the piezoelectric sensor 1A according to the second embodiment except the point that the regulatory section 3 has an annular shape.

In accordance with the regulatory section 3 having the annular shape, when making a plan view of the third surface 203 of the elastic body 2, the elastic body 2 has a circular shape as shown in FIG. 19 . In other words, the third surface 203 of the elastic body 2 has a circular shape. The circular shape includes a true circle, an oval shape, an ellipse, and so on.

Since the planar shape of the elastic body 2 is a circular shape as described above, the shape anisotropy of the elastic body 2 becomes smaller compared to when the planar shape of the elastic body 2 is a rectangular shape. Thus, it is possible to detect the direction and the magnitude of the force while suppressing the variation in sensitivity due to the direction of the force to be applied to the piezoelectric sensor 1G.

Out of the regulatory section 3 forming the annular shape, a region at the positive side in the Y axis corresponds to the first wall part 31, and a region at the negative side in the Y axis corresponds to the first wall part 32. Further, a region at the positive side in the Z axis corresponds to the second wall part 33, and a region at the negative side in the Z axis corresponds to the second wall part 34.

Further, out of the side surface of the elastic body 2, namely the surface other than the third surface 203 and the fourth surface 204, a region at the positive side in the Y axis corresponds to the first surface 201, a region at the negative side in the Y axis corresponds to the second surface 202, a region at the positive side in the Z axis corresponds to the fifth surface 205, and a region at the negative side in the Z axis corresponds to the sixth surface 206. The first wall part 31 is disposed at a position where the first wall part 31 faces the first surface 201, the first wall part 32 is disposed at a position where the first wall part 32 faces the second surface 202, the second wall part 33 is disposed at a position where the second wall part 33 faces the fifth surface 205, and the second wall part 34 is disposed at a position where the second wall part 34 faces the sixth surface 206.

Further, while in the second embodiment described above, the piezoelectric element 41 is disposed between the elastic body 2 and the second wall part 33, and the piezoelectric element 42 is disposed between the elastic body 2 and the second wall part 34, in the present embodiment, the piezoelectric element 41 is fixed to a surface at an opposite side to the elastic body 2 of the second wall part 33, and the piezoelectric element 42 is disposed on a surface at an opposite side to the elastic body 2 of the second wall part 34.

According also to such an eighth embodiment as described above, substantially the same advantages as in the second embodiment can be obtained.

10. Piezoelectric Sensor According to Ninth Embodiment

Then, a piezoelectric sensor according to a ninth embodiment will be described.

FIG. 20 is a plan view of the piezoelectric sensor according to the ninth embodiment when viewed from a position on the X axis.

The ninth embodiment will hereinafter be described. The following explanation is focused mainly on differences from the sixth and eighth embodiments, and the explanation of substantially the same matters will be omitted. It should be noted that in each of the drawings, the constituents substantially the same as those of the sixth and eighth embodiments are attached with the same reference symbols.

A piezoelectric sensor 1H according to the ninth embodiment is substantially the same as the piezoelectric sensor 1E according to the sixth embodiment except the point that the regulatory section 3 has an annular shape.

In accordance with the regulatory section 3 having the annular shape, when making a plan view of the third surface 203 of the elastic body 2, the elastic body 2 has a circular shape as shown in FIG. 20 .

Since the planar shape of the elastic body 2 is a circular shape as described above, the shape anisotropy of the elastic body 2 becomes smaller compared to when the planar shape of the elastic body 2 is a rectangular shape. Thus, it is possible to detect the direction and the magnitude of the force while suppressing the variation in sensitivity due to the direction of the force to be applied to the piezoelectric sensor 1H.

The regulatory section 3 shown in FIG. 20 is provided with four columnar parts 351 through 354. With reference to the center of the elastic body 2, the columnar part 351 is located at the positive side in the Y axis, and the positive side in the Z axis. The columnar part 352 is located at the positive side in the Y axis, and the negative side in the Z axis. The columnar part 353 is located at the negative side in the Y axis, and the positive side in the Z axis. The columnar part 354 is located at the negative side in the Y axis, and the negative side in the Z axis. Further, the columnar parts 351, 352 are arranged at positions where the columnar parts 351, 352 are coplanar with the first surface 201, and the columnar parts 353, 354 are arranged at positions where the columnar parts 353, 354 are coplanar with the second surface 202. Further, the piezoelectric element 41 is fixed so as to connect the columnar parts 351, 353 to each other, and the piezoelectric element 43 is fixed so as to connect the columnar parts 353, 354 to each other.

According also to such a ninth embodiment as described above, substantially the same advantages as in the sixth and eighth embodiments can be obtained.

The piezoelectric sensor and the robot hand according to the present disclosure are hereinabove described based on the illustrated embodiments, but the piezoelectric sensor and the robot hand according to the present disclosure are not limited to the embodiments described above, and can be, for example, those obtained by replacing the constituents of the embodiments with those having substantially the same functions and arbitrary configurations, or those obtained by adding arbitrary constituents to the embodiments, or those obtained by combining two or more of the embodiments with each other. 

What is claimed is:
 1. A piezoelectric sensor comprising: an elastic body having a first surface; a regulatory section which is disposed at a position where the regulatory section faces the first surface of the elastic body, and which is configured to limit a deformation of the elastic body; and a first piezoelectric element which is partially fixed to the regulatory section, and which deforms in accordance with the deformation of the elastic body, wherein the first piezoelectric element outputs a voltage signal which increases and decreases from the reference voltage in accordance with a direction of the deformation.
 2. The piezoelectric sensor according to claim 1, wherein the elastic body has a second surface opposed to the first surface, and the regulatory section is provided with two first wall parts disposed at a position where the first wall part faces the first surface, and a position where the first wall part faces the second surface.
 3. The piezoelectric sensor according to claim 2, wherein the regulatory section includes the two first wall parts, and two second wall parts which couple the first wall parts to each other, and which are thinner in thickness than the first wall parts, and the first piezoelectric element is fixed on the second wall part.
 4. The piezoelectric sensor according to claim 1, wherein the regulatory section includes four columnar parts disposed at positions corresponding to four corners of the elastic body.
 5. The piezoelectric sensor according to claim 1, wherein the elastic body has a third surface having a rectangular shape, and is shaped like a plate having the third surface as a principal surface.
 6. The piezoelectric sensor according to claim 5 comprising: a plurality of the piezoelectric elements, wherein the piezoelectric elements deform in respective deformation directions different from each other in accordance with the deformation of the elastic body.
 7. The piezoelectric sensor according to claim 6, wherein the piezoelectric elements include the first piezoelectric element and a second piezoelectric element, the elastic body has a fifth surface and a sixth surface corresponding to two sides opposed to each other in a plan view from the third surface, and the first piezoelectric element is disposed on the fifth surface and the second piezoelectric element is disposed on the sixth surface.
 8. The piezoelectric sensor according to claim 6, wherein the piezoelectric elements include the first piezoelectric element and a second piezoelectric element, the elastic body has a fifth surface and a sixth surface corresponding to two sides adjacent to each other in a plan view from the third surface, and the first piezoelectric element is disposed on the fifth surface and the second piezoelectric element is disposed on the sixth surface.
 9. The piezoelectric sensor according to claim 6, wherein the piezoelectric elements include the first piezoelectric element, a second piezoelectric element, a third piezoelectric element and a fourth piezoelectric element, the elastic body has the first surface, the second surface, a fifth surface and a sixth surface corresponding to four sides constituting an outer edge in a plan view from the third surface, and the first piezoelectric element is disposed on the first surface, the second piezoelectric element is disposed on the second surface, the third piezoelectric element is disposed on the fifth surface and the fourth piezoelectric element is disposed on the sixth surface.
 10. The piezoelectric sensor according to claim 1, wherein the elastic body has a third surface having a circular shape.
 11. A robot hand comprising: the piezoelectric sensor according to claim 1, and a pair of finger parts provided with the piezoelectric sensor.
 12. A robot hand comprising: the piezoelectric sensor according to claim 2, and a pair of finger parts provided with the piezoelectric sensor.
 13. A robot hand comprising: the piezoelectric sensor according to claim 3, and a pair of finger parts provided with the piezoelectric sensor.
 14. A robot hand comprising: the piezoelectric sensor according to claim 4, and a pair of finger parts provided with the piezoelectric sensor.
 15. A robot hand comprising: the piezoelectric sensor according to claim 5, and a pair of finger parts provided with the piezoelectric sensor.
 16. A robot hand comprising: the piezoelectric sensor according to claim 6, and a pair of finger parts provided with the piezoelectric sensor.
 17. A robot hand comprising: the piezoelectric sensor according to claim 7, and a pair of finger parts provided with the piezoelectric sensor.
 18. A robot hand comprising: the piezoelectric sensor according to claim 8, and a pair of finger parts provided with the piezoelectric sensor.
 19. A robot hand comprising: the piezoelectric sensor according to claim 9, and a pair of finger parts provided with the piezoelectric sensor.
 20. A robot hand comprising: the piezoelectric sensor according to claim 10, and a pair of finger parts provided with the piezoelectric sensor. 